Ansi Engineers

Alicat Scientific Mass Flow Controllers are precision gas flow measurement and control instruments that deliver rapid, accurate control of gas mass flow in industrial, research, lab, and OEM applications. They combine advanced sensing technology with fast proportional valves and on‑board processing to regulate gas flow to a user‑setpoint in real time, making them ideal for gas delivery, process automation, calibration systems, mixing, fermentation, CVD/ALD, semiconductor processes, and environmental control.

�� Key Features & Capabilities

✔ Direct Mass Flow Control: Measures and controls mass flow rate (not just volumetric flow) using advanced sensing technology — delivering stable and repeatable performance.
✔ Multi‑Variate Measurements: Many units also provide live volumetric flow, absolute pressure, and temperature readings on the display or outputs.
✔ Fast Response: Ultra‑fast control response times as low as ~30–100 ms (depending on model and range), enabling precision regulation in dynamic systems.
✔ Wide Flow Range: Models available from very low flow (e.g., <1 SCCM) up to thousands of SLPM, suitable for lab bench to large industrial systems.
✔ Pre‑Loaded Gas Calibrations: Typically include 98+ selectable gas calibrations (many models support custom gas mixtures), eliminating recalibration when switching gases.
✔ User‑Adjustable Control: Includes tunable setpoints, PID control, and adjustable averaging for optimizing performance.
✔ Display & Interfaces: Many controllers feature local LCD displays and support analog (4–20 mA / voltage) and digital (RS‑232/RS‑485/Modbus) communication for integration with automation systems.
✔ High Accuracy & Turndown: High turndown ratios (up to 10,000:1) and accuracy typically ±0.5–0.6 % of reading or ±0.1 % of full scale (depending on model and range).
✔ Robust Construction: Devices built to handle industrial environments and long‑term use, with options including low pressure drop or high pressure versions.

�� Typical Applications

• Process Gas Delivery & Control — Gas distribution in chemical processes and reactors.
• Semiconductor & Thin‑Film Deposition — Precise gas control for CVD, ALD, PVD and etching systems.
• Bioreactor & Fermentation Gas Control — Sparging and gas feed management for bioprocessing.
• Calibration & Testing Systems — Gas meter calibration and test bench control.
• Environmental & Leak Testing — Controlled gas flows for environmental chambers and tight leak test

TAzbil Mass Flow Controller – High-Precision Gas Flow Control Solution

Azbil Mass Flow Controllers (MFCs) are advanced instruments designed for accurate measurement and precise control of gas flow in critical industrial and research applications. Using thermal mass flow sensing technology, Azbil MFCs deliver high accuracy, fast response, and excellent repeatability, ensuring stable and reliable process control.

Renowned for Japanese engineering quality, Azbil mass flow controllers are widely used in semiconductor, pharmaceutical, chemical, and analytical industries, where precise gas flow regulation is essential.

🔧 Key Features

• High-accuracy thermal mass flow measurement & control

• Excellent repeatability and long-term stability

• Fast response time for dynamic process control

• Wide flow ranges for various gases (model dependent)

• Output signals: Analog (0–5 V, 4–20 mA) / Digital (model dependent)

• Compact and robust design

• Low pressure drop

• Minimal maintenance requirement

📐 Measured & Controlled Media

• Clean and dry gases such as
  Nitrogen (N₂), Oxygen (O₂), Air, Hydrogen (H₂), Argon (Ar), Helium (He), and other process gases

• Custom calibration available for specific gases

🏭 Applications

• Semiconductor and electronics manufacturing

• Pharmaceutical and biotechnology processes

• Chemical processing industries

• Gas mixing and blending systems

• Analytical instruments and laboratories

• Vacuum and coating systems

• Research & development applications

✅ Advantages

• Precise gas flow control improves process accuracy and product quality

• Stable performance in critical applications

• Easy integration with PLC, DCS, and automation systems

• Trusted Azbil (formerly Yamatake) brand reliability

📦 Popular Azbil Series

Azbil MQV, CMQ, CMC, and other mass flow controller series
(model selection based on gas type, flow range, and application)

HORIBA Mass Flow Controllers – Precision Gas Flow Measurement & Control

HORIBA Mass Flow Controllers (MFCs) are high-performance instruments designed for accurate, real-time measurement and control of gas flow in industrial, research, semiconductor, laboratory, and process automation applications. Leveraging advanced thermal and differential sensing technologies, HORIBA MFCs deliver exceptional flow accuracy, repeatability, and stability across a wide range of gas types and flow rates.

Whether used for process control or instrumentation feedback, HORIBA mass flow controllers are trusted worldwide for reliability, precision, and long-term performance.

🔑 Key Features & Capabilities📊 High Precision & Accuracy

✔ Excellent flow repeatability and stability
✔ Tight control over setpoints with minimal deviation
✔ Broad dynamic range from low to high flow rates

🔥 Advanced Thermal Sensing Technology

✔ Uses thermal measurement principles optimized for mass rather than volumetric flow
✔ Fast response time and low dead volume
✔ Minimal influence from temperature or pressure fluctuations

⚙️ Flow Range & Gas Compatibility

✔ Available for a wide range of gases — nitrogen, argon, oxygen, helium, hydrogen, and many more
✔ Custom calibration for specific gas mixtures
✔ Flow ranges from sccm to slm (standards cubic centimeters/min to liters/min)

📈 Digital & Analog Interfaces

✔ Analog inputs/outputs for integration with PLC/SCADA systems
✔ Digital communications — RS-485, Modbus, or optional fieldbus
✔ Easy interface with control systems and data logging platforms

⚡ Fast Response & Low Pressure Drop

✔ Rapid stabilization and precise control
✔ Minimal disturbance to gas system pressure and flow integrity

🧰 Quality Construction

✔ Compact, lightweight design
✔ Corrosion-resistant wetted materials (SS316L and compatible alloys)
✔ Clean, reliable operation for sensitive gas environments

📌 Typical HORIBA MFC Series🔹 SEC / STEC by HORIBA Series

• Commercial & industrial mass flow controllers

• Available in multiple flow ranges and body materials

• High accuracy for general gas control applications

🔹 High Accuracy MFC Series

• Ultra-stable flow control for R&D, calibration, and high-precision processes

• Enhanced linearity and minimal hysteresis

• 📊 Typical Specifications

🏭 Application Areas

📌 Semiconductor & Electronics Manufacturing
📌 Industrial Process Control

📌 Gas Blending & Calibration
📌 Laboratory & Research                                  📌 Environmental Monitoring                            📌 Medical & Life Sciences